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Si1-xGex selective etchant for gate-all-around transistors
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Authors
Harada, Ken
;
Suzuki, Tatsunobu
;
Kusano, Tomohiro
;
Takeshita, Kan
;
Oniki, Yusuke
;
Altamirano Sanchez, Efrain
;
Struyf, Herbert
;
Holsteyns, Frank
Conference
International Symposium on Ultra Clean Processing of Semiconductor Surfaces - UCPSS
Title
Si1-xGex selective etchant for gate-all-around transistors
Publication type
Proceedings paper
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