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Conference contributions
Si1-xGex selective etchant for gate-all-around transistors
Publication:
Si1-xGex selective etchant for gate-all-around transistors
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Date
2021
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Harada, Ken
;
Suzuki, Tatsunobu
;
Kusano, Tomohiro
;
Takeshita, Kan
;
Oniki, Yusuke
;
Altamirano Sanchez, Efrain
;
Struyf, Herbert
;
Holsteyns, Frank
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2048
since deposited on 2021-10-31
Acq. date: 2025-12-16
Citations
Metrics
Views
2048
since deposited on 2021-10-31
Acq. date: 2025-12-16
Citations