Publication:
Si1-xGex selective etchant for gate-all-around transistors
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2065 since deposited on 2021-10-31
3last month
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Acq. date: 2026-10-11
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Statistics
Views
2065 since deposited on 2021-10-31
3last month
1last week
Acq. date: 2026-10-11
Citations