Browsing by author "Daviot, Jerome"
Now showing items 1-4 of 4
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Developing TSV wet cleaning chemistry for quantum computing application
Le Tulzo, Harold; Celeste, Loriana; Tendero, Ines; Derakhshandeh, Jaber; Gerets, Carine; Thomas, Candice; Charbonnier, Jean; Deschaseaux, Edouard; Lazerand, Thierry; Daviot, Jerome (2023) -
Electrochemical, physical, and electrical characterization of two clean solutions for Cu PCMP clean
Li, Yunlong; Heylen, Nancy; Daviot, Jerome; Reid, Chris; Leunissen, Peter (2010) -
Electrochemical, physical, and electrical characterization of two clean solutions for Cu PCMP clean
Li, Yunlong; Heylen, Nancy; Daviot, Jerome; Reid, Chris; Leunissen, Peter (2012-04) -
Process dependence on defectivity count on copper and dielectric surfaces in post-copper CMP cleaning
Daviot, Jerome; Vaes, Jan (2008)