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Developing TSV wet cleaning chemistry for quantum computing application
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Authors
Le Tulzo, Harold
;
Celeste, Loriana
;
Tendero, Ines
;
Derakhshandeh, Jaber
;
Gerets, Carine
;
Thomas, Candice
;
Charbonnier, Jean
;
Deschaseaux, Edouard
;
Lazerand, Thierry
;
Daviot, Jerome
DOI
10.1016/j.mee.2023.112010
ISSN
0167-9317
Issue
Art. 112010
Journal
MICROELECTRONIC ENGINEERING
Volume
276
Title
Developing TSV wet cleaning chemistry for quantum computing application
Publication type
Journal article
Embargo date
2025-05-01
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Date
Summary
3
20.500.12860/41687.3
*
2023-09-22T10:26:07Z
validation by library/open access desk
2
20.500.12860/41687.2
2023-06-08T06:38:00Z
validation by imec author
1
20.500.12860/41687
2023-06-04T20:11:49Z
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