Developing TSV wet cleaning chemistry for quantum computing application

Le Tulzo, Harold; Celeste, Loriana; Tendero, Ines; Derakhshandeh, Jaber; Gerets, Carine; Thomas, Candice; Charbonnier, Jean; Deschaseaux, Edouard; Lazerand, Thierry; Daviot, Jerome

doi:10.1016/j.mee.2023.112010

Publication:

Developing TSV wet cleaning chemistry for quantum computing application

Date

2023

Journal article

https://doi.org/10.1016/j.mee.2023.112010

Simple item page Full metadata Statistics

Files

Accepted version 1.42 MB

Author(s)

;

;

;

;

;

;

;

;

;

Journal

MICROELECTRONIC ENGINEERING

Statistics

529 since deposited on 2023-06-04

141last month

29last week

Acq. date: 2026-02-28

1136 since deposited on 2023-06-04

1last month

Acq. date: 2026-02-28

Developing TSV wet cleaning chemistry for quantum computing application

Date

Files

Author(s)

Journal

Abstract

Description

Statistics

Downloads

Views

Citations

Statistics

Downloads

Views

Citations