Publication:

Developing TSV wet cleaning chemistry for quantum computing application

Date

2023
Journal article
https://doi.org/10.1016/j.mee.2023.112010
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Files

Accepted version 1.42 MB

Author(s)

Le Tulzo, Harold
;
Celeste, Loriana
;
Tendero, Ines
;
Derakhshandeh, Jaber  
;
Gerets, Carine  
;
Thomas, Candice
;
Charbonnier, Jean
;
Deschaseaux, Edouard
;
Lazerand, Thierry
;
Daviot, Jerome

Journal

MICROELECTRONIC ENGINEERING

Abstract

Description

Statistics

Downloads

1219 since deposited on 2023-06-04
112last month
17last week
Acq. date: 2026-09-19

Views

1142 since deposited on 2023-06-04
Acq. date: 2026-09-19

Citations

Statistics

Downloads

1219 since deposited on 2023-06-04
112last month
17last week
Acq. date: 2026-09-19

Views

1142 since deposited on 2023-06-04
Acq. date: 2026-09-19

Citations