Publication:

Developing TSV wet cleaning chemistry for quantum computing application

Date

2023
Journal article
https://doi.org/10.1016/j.mee.2023.112010
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Accepted version 1.42 MB

Author(s)

Le Tulzo, Harold
;
Celeste, Loriana
;
Tendero, Ines
;
Derakhshandeh, Jaber  
;
Gerets, Carine  
;
Thomas, Candice
;
Charbonnier, Jean
;
Deschaseaux, Edouard
;
Lazerand, Thierry
;
Daviot, Jerome

Journal

MICROELECTRONIC ENGINEERING

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96 since deposited on 2023-06-04
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1128 since deposited on 2023-06-04
Acq. date: 2025-10-27

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