Developing TSV wet cleaning chemistry for quantum computing application

Le Tulzo, Harold; Celeste, Loriana; Tendero, Ines; Derakhshandeh, Jaber; Gerets, Carine; Thomas, Candice; Charbonnier, Jean; Deschaseaux, Edouard; Lazerand, Thierry; Daviot, Jerome

doi:10.1016/j.mee.2023.112010

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Developing TSV wet cleaning chemistry for quantum computing application

Date

2023

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https://doi.org/10.1016/j.mee.2023.112010

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MICROELECTRONIC ENGINEERING

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Developing TSV wet cleaning chemistry for quantum computing application

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