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Electrochemical, physical, and electrical characterization of two clean solutions for Cu PCMP clean
Publication:
Electrochemical, physical, and electrical characterization of two clean solutions for Cu PCMP clean
Date
2012-04
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Li, Yunlong
;
Heylen, Nancy
;
Daviot, Jerome
;
Reid, Chris
;
Leunissen, Peter
Journal
Solid State Phenomena
Abstract
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1828
since deposited on 2021-10-20
Acq. date: 2025-10-29
Citations
Metrics
Views
1828
since deposited on 2021-10-20
Acq. date: 2025-10-29
Citations