Publication:
Electrochemical, physical, and electrical characterization of two clean solutions for Cu PCMP clean
Date
| dc.contributor.author | Li, Yunlong | |
| dc.contributor.author | Heylen, Nancy | |
| dc.contributor.author | Daviot, Jerome | |
| dc.contributor.author | Reid, Chris | |
| dc.contributor.author | Leunissen, Peter | |
| dc.contributor.imecauthor | Li, Yunlong | |
| dc.contributor.imecauthor | Heylen, Nancy | |
| dc.contributor.orcidimec | Li, Yunlong::0000-0003-4791-4013 | |
| dc.date.accessioned | 2021-10-20T12:44:12Z | |
| dc.date.available | 2021-10-20T12:44:12Z | |
| dc.date.issued | 2012-04 | |
| dc.identifier.issn | 1662-9779 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/21020 | |
| dc.identifier.url | www.scientific.net/SSP.187.235 | |
| dc.source.beginpage | 235 | |
| dc.source.endpage | 239 | |
| dc.source.journal | Solid State Phenomena | |
| dc.source.volume | 187 | |
| dc.title | Electrochemical, physical, and electrical characterization of two clean solutions for Cu PCMP clean | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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