Browsing by author "Das, Arijit"
Now showing items 1-1 of 1
-
Litho Process Development for Pillars to Enable High Density 4F<SUP>2</SUP> Memory Cells at 34nm Pitch
Pak, Murat; Dauendorffer, A.; Nafus, K.; Das, Arijit; Hasan, Mahmudul; Rincon Delgadillo, Paulina (2023)