EISBN
978-1-5106-6749-5
ISBN
978-1-5106-6748-8
ISSN
0277-786X
Conference
International Conference on Extreme Ultraviolet Lithography
Journal
Proceedings of SPIE
Volume
12750
Title
Litho Process Development for Pillars to Enable High Density 4F<SUP>2</SUP> Memory Cells at 34nm Pitch
Publication type
Proceedings paper