Browsing by author "Kim, Kee - Ho"
Now showing items 1-3 of 3
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CD control for 180-nm and 130-nm gate-level lithography
Kim, Kee - Ho; Ronse, Kurt; Goethals, Mieke; Vandenberghe, Geert; Van den hove, Luc (1996) -
Characterization and optimization of CD control for 0.25µm CMOS applications
Ronse, Kurt; Op de Beeck, Maaike; Yen, Anthony; Kim, Kee - Ho; Van den hove, Luc (1996) -
Feasability demonstration of 0.18 µm and 0.13 µm optical projection lithography based on CD control calculations
Kim, Kee - Ho; Ronse, Kurt; Yen, Anthony; Van den hove, Luc (1996)