Browsing by author "Bevis, Christopher"

Now showing items 1-1 of 1

The application of a Rapid Probe Microscope (RPM) for investigating 1D and 2D structures from EUV lithography

Humphris, Andrew; Moussa, Alain; Dusa, Mircea; Charley, Anne-Laure; Newman, Ellis; Goulden, Jenny; Feng, Lei; Bevis, Christopher (2020)