Browsing by author "Vandenberg, J.A."
Now showing items 1-4 of 4
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Assessment of the near-surface profiling capabilities of SIMS
Vandervorst, Wilfried; Janssens, Tom; Fruehauf, Jens; Ross, I.M.; Cullis, A.; Vandenberg, J.A.; Bergmaier, A.; Dollinger, G. (2003) -
Characterization of low energy (2-5keV) implantation into Si
Collart, E.J.; Kirkwood, D.; Vandenberg, J.A.; Werner, M.; Vandervorst, Wilfried; Brijs, Bert; Bailey, P.; Noakes, T.C.Q. (2002) -
Errors in near-surface and interfacial profiling of boron and arsenic
Vandervorst, Wilfried; Janssens, Tom; Brijs, Bert; Conard, Thierry; Huyghebaert, Cedric; Frühauf, J.; Bergmaier, A.; Dollinger, G.; Buyuklimanli, T.; Vandenberg, J.A.; Kimura, K. (2004-05) -
Near-surface B/As profiling with SIMS: (in)solvable problems?
Vandervorst, Wilfried; Geenen, Luc; Huyghebaert, Cedric; Fruehauf, Jens; Bergmaier, A.; Dollinger, G.; Vandenberg, J.A. (2003)