Authors

Vandervorst, Wilfried; Janssens, Tom; Brijs, Bert; Conard, Thierry; Huyghebaert, Cedric; Frühauf, J.; Bergmaier, A.; Dollinger, G.; Buyuklimanli, T.; Vandenberg, J.A.; Kimura, K.

Conference

Proceedings of the 14th Int. Conference on Secondary Ion Mass Spectometry and Related Topics

Title

Errors in near-surface and interfacial profiling of boron and arsenic

Publication type

Proceedings paper