Publication:

Errors in near-surface and interfacial profiling of boron and arsenic

Date

2004-05
Proceedings Paper
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dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorJanssens, Tom
dc.contributor.authorBrijs, Bert
dc.contributor.authorConard, Thierry
dc.contributor.authorHuyghebaert, Cedric
dc.contributor.authorFrühauf, J.
dc.contributor.authorBergmaier, A.
dc.contributor.authorDollinger, G.
dc.contributor.authorBuyuklimanli, T.
dc.contributor.authorVandenberg, J.A.
dc.contributor.authorKimura, K.
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorHuyghebaert, Cedric
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecHuyghebaert, Cedric::0000-0001-6043-7130
dc.date.accessioned2021-10-15T17:24:37Z
dc.date.available2021-10-15T17:24:37Z
dc.date.issued2004-05
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9824
dc.source.beginpage618
dc.source.conferenceProceedings of the 14th Int. Conference on Secondary Ion Mass Spectometry and Related Topics
dc.source.conferencedate14/09/2003
dc.source.conferencelocationSan Diego, CA USA
dc.source.endpage631
dc.title

Errors in near-surface and interfacial profiling of boron and arsenic

dc.typeProceedings paper
dspace.entity.typePublication
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