Browsing by author "Polleunis, C."
Now showing items 1-3 of 3
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Advanced characterisation : an indispensable tool for ultra clean processing
Vandervorst, Wilfried; Bender, Hugo; Storm, Wolfgang; Heyns, Marc; Polleunis, C.; Bertrand, P. (1995) -
Degradation of clean Si-surfaces due to storage in clean (?) wafer boxes
Storm, Wolfgang; Vandervorst, Wilfried; Alay, Josep Lluis; Meuris, Marc; Opdebeeck, Ann; Heyns, Marc; Polleunis, C.; Bertrand, P. (1994) -
Just-Clean- Enough technology for the 21st century
Heyns, Marc; Meuris, Marc; Mertens, Paul; Hurd, Trace; Schmidt, Harald; Depas, Michel; Rotondaro, Antonio; Vermeire, Bert; Vandervorst, Wilfried; Storm, Wolfgang; Polleunis, C.; Bertrand, P.; McGeary, M. J.; Lubbers, A.; Hatcher, Z. (1995)