Authors

Storm, Wolfgang; Vandervorst, Wilfried; Alay, Josep Lluis; Meuris, Marc; Opdebeeck, Ann; Heyns, Marc; Polleunis, C.; Bertrand, P.

Conference

Proceedings of the 2nd International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSS

Title

Degradation of clean Si-surfaces due to storage in clean (?) wafer boxes

Publication type

Proceedings paper

Embargo date

9999-12-31