Browsing by author "Pique, D."

Now showing items 1-3 of 3

Gate dielectrics for high performance and low power CMOS SoC applications

Cubaynes, Florence; Dachs, Charles; Detcheverry, Celine; Zegers, A.; Venezia, Vincent; Schmitz, Jurriaan; Stolk, Peter; Jurczak, Gosia; Henson, Kirklen; Degraeve, Robin; Rothschild, Aude; Conard, Thierry; Pétry, Jasmine; Da Rold, Martina; Schaekers, Marc; Badenes, Gonçal; Date, L.; Pique, D.; Al-Shareef, H.; Murto, R. (2002)
Growth and physical properties of MOCVD-deposited hafnium oxide films and their properties on silicon

Van Elshocht, Sven; Caymax, Matty; De Gendt, Stefan; Conard, Thierry; Petry, Jasmine; Claes, Martine; Witters, Thomas; Zhao, Chao; Brijs, Bert; Richard, Olivier; Bender, Hugo; Vandervorst, Wilfried; Carter, Richard; Kluth, Jon; Daté, L.; Pique, D.; Heyns, Marc (2003)
High-k materials for advanced gate stack dielectrics: a comparison of ALCVD and MOCVD as deposition technologies

Caymax, Matty; Bender, Hugo; Brijs, Bert; Conard, Thierry; De Gendt, Stefan; Delabie, Annelies; Heyns, Marc; Onsia, Bart; Ragnarsson, Lars-Ake; Richard, Olivier; Vandervorst, Wilfried; Van Elshocht, Sven; Zhao, Chao; Maes, J.W.; Daté, L.; Pique, D.; Young, E.; Tsai, W.; Shimamoto, Y. (2003)