Browsing by author "Bommels, Juergen"

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    • Ruthenium metallization for advanced interconnects 

      Wen, Liang Gong; Adelmann, Christoph; Varela Pedreira, Olalla; Dutta, Shibesh; Popovici, Mihaela Ioana; Briggs, Basoene; Heylen, Nancy; Vanstreels, Kris; Wilson, Chris; Van Elshocht, Sven; Croes, Kristof; Bommels, Juergen; Tokei, Zsolt (2016)