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Ruthenium metallization for advanced interconnects
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Authors
Wen, Liang Gong
;
Adelmann, Christoph
;
Varela Pedreira, Olalla
;
Dutta, Shibesh
;
Popovici, Mihaela Ioana
;
Briggs, Basoene
;
Heylen, Nancy
;
Vanstreels, Kris
;
Wilson, Chris
;
Van Elshocht, Sven
;
Croes, Kristof
;
Bommels, Juergen
;
Tokei, Zsolt
Conference
IEEE International Interconnect Technology Conference / Advanced Metallization Conference - IITC/AMC
Title
Ruthenium metallization for advanced interconnects
Publication type
Proceedings paper
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