Publication:

Ruthenium metallization for advanced interconnects

Date

2016
Proceedings Paper
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dc.contributor.authorWen, Liang Gong
dc.contributor.authorAdelmann, Christoph
dc.contributor.authorVarela Pedreira, Olalla
dc.contributor.authorDutta, Shibesh
dc.contributor.authorPopovici, Mihaela Ioana
dc.contributor.authorBriggs, Basoene
dc.contributor.authorHeylen, Nancy
dc.contributor.authorVanstreels, Kris
dc.contributor.authorWilson, Chris
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorCroes, Kristof
dc.contributor.authorBommels, Juergen
dc.contributor.authorTokei, Zsolt
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorVarela Pedreira, Olalla
dc.contributor.imecauthorPopovici, Mihaela Ioana
dc.contributor.imecauthorBriggs, Basoene
dc.contributor.imecauthorHeylen, Nancy
dc.contributor.imecauthorVanstreels, Kris
dc.contributor.imecauthorWilson, Chris
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorCroes, Kristof
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.contributor.orcidimecVanstreels, Kris::0000-0002-4420-0966
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.contributor.orcidimecCroes, Kristof::0000-0002-3955-0638
dc.date.accessioned2021-10-23T17:08:46Z
dc.date.available2021-10-23T17:08:46Z
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27583
dc.identifier.urlhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7507651
dc.source.beginpage34
dc.source.conferenceIEEE International Interconnect Technology Conference / Advanced Metallization Conference - IITC/AMC
dc.source.conferencedate23/05/2016
dc.source.conferencelocationSan Jose, CA USA
dc.source.endpage36
dc.title

Ruthenium metallization for advanced interconnects

dc.typeProceedings paper
dspace.entity.typePublication
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