Ruthenium metallization for advanced interconnects

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Author(s)

Wen, Liang Gong

;

Adelmann, Christoph

;

Varela Pedreira, Olalla

;

;

Popovici, Mihaela Ioana

;

Briggs, Basoene

;

;

Vanstreels, Kris

;

;

Van Elshocht, Sven

;

;

Bommels, Juergen

;

Metrics

2111 since deposited on 2021-10-23

Acq. date: 2025-10-23