Browsing by author "Curvacho, Gabriel"

Now showing items 1-1 of 1

    • Low Landing Energy as an Enabler for Optimal Contour Based OPC Modeling in the EUV Era 

      Alkoken, Ran; Baram, Mor; Oron, Gadi; Schuch, Nivea; Robert, Frederic; Figueiro, Thiago; Brand, Omri; Geta, Matan; Saha, Kasturi; Miller, Elias; Zavhon, Tal; Tiwari, Dipayan; Singh, Deepakkumar; Sarkar, Sujan Kumar; Rincon Delgadillo, Paulina; Lorusso, Gian; Beral, Christophe; Wei, Chih-I; Curvacho, Gabriel; Kim, Young Chang; Fenger, Germain (2024)