Browsing by author "Clark, R"

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Ultralow resistive wrap around contact to scaled FinFET devices by using ALD-Ti contact metal

Chew, Soon Aik; Yu, Hao; Schaekers, Marc; Demuynck, Steven; Mannaert, Geert; Kunnen, Eddy; Rosseel, Erik; Hikavyy, Andriy; Dangol, Anish; De Meyer, Kristin; Mocuta, Dan; Horiguchi, Naoto; Leusink, Gert; Wajda, Cory; Hakamata, T; Hasegawa, T; Tapily, K; Clark, R (2017)