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Ultralow resistive wrap around contact to scaled FinFET devices by using ALD-Ti contact metal
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Acq. date: 2025-12-12
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Acq. date: 2025-12-12
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1 since deposited on 2021-10-24
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2035 since deposited on 2021-10-24
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Acq. date: 2025-12-12
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