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Ultralow resistive wrap around contact to scaled FinFET devices by using ALD-Ti contact metal
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1 since deposited on 2021-10-24
Acq. date: 2025-10-26
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2033 since deposited on 2021-10-24
Acq. date: 2025-10-26
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1 since deposited on 2021-10-24
Acq. date: 2025-10-26
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2033 since deposited on 2021-10-24
Acq. date: 2025-10-26
Citations