Browsing by author "Gushchin, O."
Now showing items 1-2 of 2
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Application of fully fluorinated cyclic saturated hydrocarbons for highly selective nanoscale silicon dioxide reactive ion etching
Yanovich, S.; Baklanov, Mikhaïl; Orlov, S.; Gushchin, O.; Zaitsev, N.; Ignatov, P.; Yafarov, R. (2012) -
Maskless fabrication of high density silicon nan-pin structures with carbon nano clusters acting as mask for subsequent microwave silicon etching
Yanovich, S.; Baklanov, Mikhaïl; Gushchin, O.; Gornev, E.; Danila, A. (2012)