Authors

Yanovich, S.; Baklanov, Mikhaïl; Orlov, S.; Gushchin, O.; Zaitsev, N.; Ignatov, P.; Yafarov, R.

Conference

Plasma Etch and Strip in Microelectronics - PESM

Title

Application of fully fluorinated cyclic saturated hydrocarbons for highly selective nanoscale silicon dioxide reactive ion etching

Publication type

Meeting abstract