Browsing by author "Helfenstein, Patrick"
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Experimental evaluation of the impact of carbon nanotube EUV pellicles on reticle imaging
Mochi, Iacopo; Timmermans, Marina; Gallagher, Emily; Mariano, Marina; Pollentier, Ivan; Rajendran, Rajeev; Helfenstein, Patrick; Fernandez, Sara; Kazazis, Dimitrios; Ekinci, Yasin (2019)