Experimental evaluation of the impact of carbon nanotube EUV pellicles on reticle imaging

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Authors

Mochi, Iacopo; Timmermans, Marina; Gallagher, Emily; Mariano, Marina; Pollentier, Ivan; Rajendran, Rajeev; Helfenstein, Patrick; Fernandez, Sara; Kazazis, Dimitrios; Ekinci, Yasin

ISSN

1932-5150

Issue

1

Journal

Journal of Micro/Nanolithography MEMS and MOEMS

Volume

18

Title

Experimental evaluation of the impact of carbon nanotube EUV pellicles on reticle imaging

Publication type

Journal article

Embargo date

9999-12-31

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