Publication:

Experimental evaluation of the impact of carbon nanotube EUV pellicles on reticle imaging

Date

2019
Journal article
Simple item page Full metadata Statistics
 
dc.contributor.authorMochi, Iacopo
dc.contributor.authorTimmermans, Marina
dc.contributor.authorGallagher, Emily
dc.contributor.authorMariano, Marina
dc.contributor.authorPollentier, Ivan
dc.contributor.authorRajendran, Rajeev
dc.contributor.authorHelfenstein, Patrick
dc.contributor.authorFernandez, Sara
dc.contributor.authorKazazis, Dimitrios
dc.contributor.authorEkinci, Yasin
dc.contributor.imecauthorTimmermans, Marina
dc.contributor.imecauthorGallagher, Emily
dc.contributor.imecauthorMariano, Marina
dc.contributor.imecauthorPollentier, Ivan
dc.contributor.orcidimecTimmermans, Marina::0000-0001-9805-8259
dc.contributor.orcidimecGallagher, Emily::0000-0002-2927-8298
dc.contributor.orcidimecPollentier, Ivan::0000-0002-4266-6500
dc.date.accessioned2021-10-27T14:05:21Z
dc.date.available2021-10-27T14:05:21Z
dc.date.embargo9999-12-31
dc.date.issued2019
dc.identifier.issn1932-5150
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/33598
dc.identifier.urlhttps://doi.org/10.1117/1.JMM.18.1.014002
dc.source.beginpage14002
dc.source.issue1
dc.source.journalJournal of Micro/Nanolithography MEMS and MOEMS
dc.source.volume18
dc.title

Experimental evaluation of the impact of carbon nanotube EUV pellicles on reticle imaging

dc.typeJournal article
dspace.entity.typePublication
Files

Original bundle

Name:
44421.pdf
Size:
4.2 MB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Articles