Publication:
Experimental evaluation of the impact of carbon nanotube EUV pellicles on reticle imaging
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1970 since deposited on 2021-10-27
1last month
Acq. date: 2025-12-11
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Metrics
Views
1970 since deposited on 2021-10-27
1last month
Acq. date: 2025-12-11
Citations