Browsing by author "Postnikov, Sergei"

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Application of immersion lithography inside the MEDEA+ LIQUID project

Massin, Jean; Kupers, Michiel; Thony, Philippe; Postnikov, Sergei; Ercken, Monique; Morton, Rob (2005)
Model-based design improvements for the 100nm lithography generation

Lucas, Kevin; Postnikov, Sergei; Patterson, Kyle; Yuan, Min-Chi; Thomas, Carla; Thompson, Matt; Carter, Rusty; Litt, Lloyd; Montgomery, Patrick; Wimmer, Karl (2002)