Browsing by author "Curley, J. W."

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Evaluation of stress reduction in shallow trench isolation CMOS structures via synchrotron X-ray topography, Raman spectroscopy and electrical data

McNally, P. J.; Curley, J. W.; Bolt, M.; Reader, A.; De Wolf, Ingrid; Tuomi, T.; Rantamäki, R.; Danilewski, A. N. (1998)
Monitoring of stress reduction in shallow trench isolation CMOS structures via synchrotron x-ray topography, electrical data and Raman spectroscopy

McNally, P. J.; Curley, J. W.; Bolt, M.; Reader, A.; Tuomi, T.; Rantamaki, R.; Danilewsky, A. N.; De Wolf, Ingrid (1999)