Authors

McNally, P. J.; Curley, J. W.; Bolt, M.; Reader, A.; Tuomi, T.; Rantamaki, R.; Danilewsky, A. N.; De Wolf, Ingrid

Issue

5_6

Journal

J. Materials Science: Materials in Electronics

Volume

10

Title

Monitoring of stress reduction in shallow trench isolation CMOS structures via synchrotron x-ray topography, electrical data and Raman spectroscopy

Publication type

Journal article

Embargo date

9999-12-31