Browsing by author "Kempsell Sears, Monica"

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Lens wavefront compensation for 3D photomask effects in subwavelength optical lithography

Kempsell Sears, Monica; Bekaert, Joost; Smith, Bruce W. (2013)
Pupil wavefront manipulation for optical nanolithography

Kempsell Sears, Monica; Bekaert, Joost; Smith, Bruce W. (2012)