Publication:
Lens wavefront compensation for 3D photomask effects in subwavelength optical lithography
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1873 since deposited on 2021-10-21
3last month
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Acq. date: 2026-02-25
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Statistics
Views
1873 since deposited on 2021-10-21
3last month
1last week
Acq. date: 2026-02-25
Citations