Lens wavefront compensation for 3D photomask effects in subwavelength optical lithography

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Authors

Kempsell Sears, Monica; Bekaert, Joost; Smith, Bruce W.

ISSN

0003-6935

Issue

3

Journal

Applied Optics

Volume

52

Title

Lens wavefront compensation for 3D photomask effects in subwavelength optical lithography

Publication type

Journal article

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