Publication:
Lens wavefront compensation for 3D photomask effects in subwavelength optical lithography
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1877 since deposited on 2021-10-21
4last month
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Acq. date: 2026-10-10
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Statistics
Views
1877 since deposited on 2021-10-21
4last month
2last week
Acq. date: 2026-10-10
Citations