Browsing by author "Arleo, Paul"
Now showing items 1-5 of 5
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Discovering practical use of sensor wafers in CCP reactors
Milenin, Alexey; Demand, Marc; Boullart, Werner; Arleo, Paul (2011) -
On characterization of etch processes in TCP reactor with PlasmaVolt X2 sensor wafer
Milenin, Alexey; de Marneffe, Jean-Francois; Struyf, Herbert; Boullart, Werner; Arleo, Paul (2010) -
Sensor wafers in modern plasma etching technology
Milenin, Alexey; de Marneffe, Jean-Francois; Struyf, Herbert; Boullart, Werner; Arleo, Paul (2009) -
Study on metrology of ERU tuning in TCP reactor using PVx2 sensor wafer
Milenin, Alexey; de Marneffe, Jean-Francois; Struyf, Herbert; Boullart, Werner; Arleo, Paul (2010) -
Temperature and RF current sensor wafers for plasma etching
Milenin, Alexey; Demand, Marc; Boullart, Werner; Arleo, Paul (2012)