Publication:

On characterization of etch processes in TCP reactor with PlasmaVolt X2 sensor wafer

Date

2010
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Author(s)

Milenin, Alexey  
;
de Marneffe, Jean-Francois  
;
Struyf, Herbert  
;
Boullart, Werner  
;
Arleo, Paul

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1877 since deposited on 2021-10-18
Acq. date: 2026-04-05

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