Browsing by author "Gupta, Puneet"

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Defect avoidance for extreme-ultraviolet mask defects using intentional pattern deformation

Chae, Yoo-jin; Jonckheere, Rik; Gupta, Puneet (2018)
Understanding design-patterning interactions

Gupta, Puneet; Mallik, Arindam; Torres, Juan Andres (2013)