Browsing by author "Burkeen, Frank"
Now showing items 1-2 of 2
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Detection, binning, and analysis of defects in a GaN-on-Si process for high brightness light emitting diodes
Halder, Sandip; Miller, Andy; Osman, Haris; Dutta, Barundeb; Mani, Antonio; Jones, Chris; McCance, Syd; Burkeen, Frank (2012) -
Innovative metrology for wafer edge defectivity in immersion lithography
Pollentier, Ivan; Iwamoto, Fumio; Kocsis, Michael; Somanchi, Anoop; Burkeen, Frank; Vedula, Srinivas (2007)