Browsing by author "Hideaki, Iino"
Now showing items 1-5 of 5
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Challenges and solutions of replacement metal gate patterning to enable gate-all-around device scaling
Oniki, Yusuke; Ragnarsson, Lars-Ake; Hideaki, Iino; Cott, Daire; Chan, BT; Sebaai, Farid; Hopf, Toby; Dekkers, Harold; Dentoni Litta, Eugenio; Altamirano Sanchez, Efrain; Holsteyns, Frank; Horiguchi, Naoto (2021) -
Cobalt pre-metallization clean and functional water rinse in BEOL interconnect
Kesters, Els; Le, Quoc Toan; van der Veen, Marleen; Akanishi, Yuya; Hideaki, Iino; Mizutani, Atsushi; Holsteyns, Frank (2019) -
Functional water solutions to enable wet cleaning process for leading edge semiconductor device manufacturing
Kesters, Els; Hideaki, Iino; Yuichi, Ogawa; Oniki, Yusuke; Le, Quoc Toan; Holsteyns, Frank (2019) -
Study on La2O3 wet clean by pH controlled functional water
Ogawa, Yuichi; Hideaki, Iino; Fukui, Takeo; Oniki, Yusuke; Akanishi, Yuya; Altamirano Sanchez, Efrain; Holsteyns, Frank (2019) -
Wetting of deep hydrophilic nanoholes by aqueous solutions
Vereecke, Guy; Darcos, Audrey; Hideaki, Iino; Holsteyns, Frank; Altamirano Sanchez, Efrain (2020)