Publication:
Challenges and solutions of replacement metal gate patterning to enable gate-all-around device scaling
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2343 since deposited on 2021-10-31
11last month
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Acq. date: 2026-01-06
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Views
2343 since deposited on 2021-10-31
11last month
1last week
Acq. date: 2026-01-06
Citations