Authors

Oniki, Yusuke; Ragnarsson, Lars-Ake; Hideaki, Iino; Cott, Daire; Chan, BT; Sebaai, Farid; Hopf, Toby; Dekkers, Harold; Dentoni Litta, Eugenio; Altamirano Sanchez, Efrain; Holsteyns, Frank; Horiguchi, Naoto

Conference

International Symposium on Ultra Clean Processing of Semiconductor Surfaces - UCPSS

Title

Challenges and solutions of replacement metal gate patterning to enable gate-all-around device scaling

Publication type

Proceedings paper