Publication:
Challenges and solutions of replacement metal gate patterning to enable gate-all-around device scaling
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2361 since deposited on 2021-10-31
5last month
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Acq. date: 2026-03-17
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Statistics
Views
2361 since deposited on 2021-10-31
5last month
2last week
Acq. date: 2026-03-17
Citations