Authors

Ogawa, Yuichi; Hideaki, Iino; Fukui, Takeo; Oniki, Yusuke; Akanishi, Yuya; Altamirano Sanchez, Efrain; Holsteyns, Frank

Conference

ECS Fall Meeting G01-16th International Symposium on Semiconductor Cleaning Science and Technology (SCST 16)

Title

Study on La2O3 wet clean by pH controlled functional water

Publication type

Meeting abstract