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Study on La2O3 wet clean by pH controlled functional water
Publication:
Study on La2O3 wet clean by pH controlled functional water
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Date
2019
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Ogawa, Yuichi
;
Hideaki, Iino
;
Fukui, Takeo
;
Oniki, Yusuke
;
Akanishi, Yuya
;
Altamirano Sanchez, Efrain
;
Holsteyns, Frank
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1933
since deposited on 2021-10-27
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Acq. date: 2025-12-13
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Views
1933
since deposited on 2021-10-27
2
last month
1
last week
Acq. date: 2025-12-13
Citations