Browsing by author "Stokich, T."
Now showing items 1-2 of 2
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Integration of a low permittivity spin-on embedded hardmask for Cu/SiLK resin dual damascene
Waeterloos, Joost; Shaffer, E. O.; Stokich, T.; Hetzner, J.; Price, D.; Booms, L.; Donaton, R. A.; Beyer, Gerald; Coenegrachts, Bart; Caluwaerts, Rudy; Struyf, Herbert; Tokei, Zsolt; Vervoort, Iwan; Sjjmus, B.; Vos, I.; Maex, Karen; Komiya, Takayuki; Iwashita, J. M. (2001) -
Mechanical analysis of a SiLK/Cu dual damascene interconnect system
Waeterloos, Joost; Shaffer, E.; Stokich, T.; Alves Donaton, Ricardo; Maex, Karen (2001)