Browsing by author "Fan, Yongfa"

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Binary modeling method to check the sub-resolution assist features (SRAFs) printability

Li, Jianliang; Gao, Weimin; Fan, Yongfa; Xue, Jing; Yan, Qiliang; Lucas, Kevin; De Bisschop, Peter; Melvin III, Lawrence S. (2012)
Mask-induced polarization effects at high NA

Estroff, Andrew; Fan, Yongfa; Bourov, Anatoly; Smith, Bruce; Foubert, Philippe; Leunissen, Peter; Philipsen, Vicky; Aksenov, Yuri (2005-03)