Mask-induced polarization effects at high NA

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Authors
Estroff, Andrew; Fan, Yongfa; Bourov, Anatoly; Smith, Bruce; Foubert, Philippe; Leunissen, Peter; Philipsen, Vicky; Aksenov, Yuri
Conference
Optical Microlithography XVIII
Title
Mask-induced polarization effects at high NA
Publication type
Proceedings paper
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