Publication:

Mask-induced polarization effects at high NA

Date

2005-03

Proceedings Paper

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Author(s)

Estroff, Andrew

;

;

Bourov, Anatoly

;

;

Foubert, Philippe

;

Leunissen, Peter

;

Philipsen, Vicky

;

Metrics

1910 since deposited on 2021-10-16

Acq. date: 2025-12-11